Silicon/Porous Silicon Composite Membrane for High Sensitivity Pressure Sensor

Abstract

This project investigated the fundamentals of porous silicon (PS) in MEMS pressure sensors. The low Young's modulus of PS has been utilized to obtain higher sensitivity in pressure sensors with Si/PS composite membranes. Simulation using Coventorware representing the Si/PS composite membrane with a simple two layer model shows an increase in sensitivity with increase in porosity and thickness of the PS layer. It is concluded that the high sensitivity and reproducible linear behavior at low pressures make composite membranes a viable option for low pressure measurement. To strike a balance between sensitivity and offset voltage, macro porous silicon may be a better option than micro porous silicon.

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Document Details

Document Type
Technical Report
Publication Date
Jul 21, 2009
Accession Number
ADA502747

Entities

People

  • Enakshi Bhattacharya
  • L. Sujatha

Organizations

  • Indian Institute of Technology Madras

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Composite Materials
  • Electrical Engineering
  • Equations
  • Fabrication
  • Films
  • Geometry
  • High Pressure
  • Materials
  • Measurement
  • Membranes
  • Metal-Semiconductor Junctions
  • Microelectromechanical Systems
  • Modulus Of Elasticity
  • Porosity
  • Pressure Gages
  • Self Assembled Monolayers
  • Thickness

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