Electrostatically Actuated Resonant Microcantilever Beam in CMOS Technology for the Detection of Chemical Weapons

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2005
Accession Number
ADA503056

Entities

People

  • Eric J. Houser
  • Gary K. Fedder
  • Ioana Voiculescu
  • Mona E. Zaghloul
  • R. A. Mcgill

Organizations

  • George Washington University

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors
  • Weapons Technologies

DTIC Thesaurus Topics

  • Analyzers
  • Cantilever Beams
  • Chemical Detectors
  • Chemical Warfare
  • Chemical Warfare Agents
  • Chemical Weapons
  • Detection
  • Detectors
  • Fabrication
  • Films
  • Frequency
  • Frequency Shift
  • Measurement
  • Microelectromechanical Systems
  • Modulus Of Elasticity
  • Nerve Agents
  • Resonant Frequency