Microsystems, Scaling, and Integration (BRIEFING CHARTS) Open PDF Document Details Document Type Technical Report Publication Date Mar 06, 2007 Accession Number ADA503730 Entities People Amit Lal Organizations Defense Advanced Research Projects Agency Tags Communities of Interest Advanced Electronics Sensors DTIC Thesaurus Topics Abstracts Actuators Alkali Metals Atomic Clocks Ball Bearings Body Weight Composite Materials Computers Electronics Electronics Industry Energy Harvesting Graphitic Materials High Temperature Information Operations Micro-Machines Platforms Switches