Nanoenabled Directions for N/MEMS (BRIEFING CHARTS) Open PDF Document Details Document Type Technical Report Publication Date Mar 06, 2007 Accession Number ADA503813 Entities People Dennis Polla Organizations Defense Advanced Research Projects Agency Tags Communities of Interest Advanced Electronics Biomedical DTIC Thesaurus Topics Analyzers Biotechnology Chemical Warfare Agents Detection Detectors Electronics Energy Harvesting Explosives Detection Failure Mode And Effect Analysis Lessons Learned Materials Micro-Machines Microelectromechanical Systems Nanoparticles Nanosensors Nanotechnology Nanowires