Recent Progress in Silicon Mems Oscillators

Abstract

This paper first reviews key milestones in the making of silicon MEMS oscillators and how MEMS resonators can be used as frequency references for electronic systems, starting from silicon resonators device designs with different fabrication processes, to wafer level packaging technologies, to the robustness of volume manufacturing processes. Secondly, as final products, various MEMS oscillators from various companies are compared with quartz crystal oscillators in terms of jitter, power consumption, and temperature stability. Finally, to ensure the performance is good for real electronics applications, silicon MEMS oscillators not only have passed standard JEDEC reliability tests such as aging, solder reflow, thermal shock, and autoclave, but also have been demonstrated in several electronic systems.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 2008
Accession Number
ADA504079

Entities

People

  • Wan-thai Hsu

Tags

DTIC Thesaurus Topics

  • Accuracy
  • Circuits
  • Crystal Oscillators
  • Electronic Circuits
  • Environment
  • Fabrication
  • Frequency
  • Manufacturing
  • Materials
  • Microelectromechanical Systems
  • Oscillators
  • Packaging
  • Reliability
  • Semiconductors
  • Standards
  • Temperature Coefficients
  • Time Intervals

Fields of Study

  • Engineering

Readers

  • Electronics Engineering
  • Integrated Circuit Design and Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems