Hydrogen Effects on Silicon Microsystems

Abstract

This report results from a contract tasking University of Uppsala as follows: The proposed work contains two parts, first the ordinary literature survey work with a summary report including conclusions, and second, some experimental work supporting the design of a high pressure check valve. Two test structures are foreseen to be used. 1) A direct fusion bonded wafer samples with different surface activation prior to bonding shall be exposed to high pressure Hydrogen for a significant period of time. After burst test of all samples shall the bonding strength be calculated and a statistical analysis performed. 2) The second test structure shall be used to examine embrittlement of springs in mono crystalline silicon. The stiffness and strength of very small beams shall be measured and analyzed. Two reports will be delivered, a midterm report halfway through the study, and a final data package including a summary report at end of contract. A conference contribution is foreseen to be a part of the final data package.

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Document Details

Document Type
Technical Report
Publication Date
Feb 15, 2009
Accession Number
ADA504550

Entities

People

  • Lars G. Stenmark

Organizations

  • Uppsala University

Tags

DTIC Thesaurus Topics

  • Check Valves
  • Contracts
  • Control Systems
  • Elements
  • Embrittlement
  • High Pressure
  • Hydrogen
  • Hydrogen Storage
  • Literature Surveys
  • Materials
  • Measurement
  • Mechanical Properties
  • Statistical Analysis
  • Stiffness
  • Test Equipment
  • Universities
  • Valves

Readers

  • Materials Science and Engineering.
  • Systems Analysis and Design
  • Technical Research and Report Writing.