Toward Three Dimensional Circuits Formed by Molten-Alloy Driven Self-Assembly
Abstract
Self-assembly opens new possibilities in three-dimensional (3-D) device structures, and here we report on our progress toward a self-assembling 3-D circuit. A major challenge to such a system has been the fabrication of large numbers of free-standing, microfabricated parts, and we have overcome this challenge by developing a new wafer-bond and release process. We present this process on 100 mm diameter wafers, and finally show initial assembly results.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 2008
- Accession Number
- ADA505770
Entities
People
- Christopher J. Morris
- Madan Dubey
Organizations
- United States Army Research Laboratory