Piezomems Devices for Advanced Communications and Phased Array Radar

Abstract

In this article, we report on the successful demonstration of lead zirconate titanate (PZT) thin film based MEMS devices for use in radio frequency (RF) systems. Individual series switches and single pole multi-throw switching elements operating at or below 10 V have been developed capable of operating over a wide temperature range. The switch technology also provides an enabling technology for low voltage, mechanical logic. Along with switches and phase shifters, PZT based MEMS resonators show promise in the sub-GHz regime with demonstrated insertion loss values near 3.5 dB.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 2008
Accession Number
ADA505912

Entities

People

  • Daniel Judy
  • Jeffrey S. Pulskamp
  • Ronald G. Polcawich

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Ceramic Materials
  • Communication Systems
  • Demonstrations
  • Fabrication
  • Films
  • Frequency
  • Insertion Loss
  • Lead Zirconate Titanates
  • Low Voltage
  • Micro-Machines
  • Microelectromechanical Systems
  • Micromachining
  • Phased Arrays
  • Radar
  • Radio Frequency
  • Resonators
  • Thin Films

Readers

  • Electrical Engineering
  • Materials Science and Engineering.
  • Optical Physics and Photonics.