Quartz Crystal Microbalance Based System for High-Sensitivity Differential Sputter Yield Measurements (Preprint)

Abstract

We present a quartz crystal microbalance (QCM) based system for high sensitivity differential sputter yield measurements of different target materials due to ion bombardment. The differential sputter yields can be integrated to find total yields. Possible ion beam conditions include ion energies in the range of 30-350 eV and incidence angles of 0-70o from normal. A four-grid ion optics system is used to achieve a collimated ion beam at low energy (<100 eV) and a two grid ion optics is used for higher energies (up to 750 eV). A complementary weight loss approach is also used to measure total sputter yields. Validation experiments are presented that confirm high sensitivity and accuracy of sputter yield measurements.

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Document Details

Document Type
Technical Report
Publication Date
Aug 20, 2009
Accession Number
ADA506240

Entities

People

  • A. P. Yalin
  • B. Rubin
  • C. C. Farnell
  • J. L. Topper

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Air Platforms
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Accuracy
  • Air Force Research Laboratories
  • Body Weight
  • Ceramic Materials
  • Charged Particles
  • Electric Propulsion
  • Ion Beams
  • Ion Bombardment
  • Ions
  • Laser Induced Fluorescence
  • Mass Spectrometry
  • Materials
  • Measurement
  • Microbalances
  • Particle Bombardment
  • Quartz Crystal Microbalances
  • Spectrometry

Fields of Study

  • Physics

Readers

  • Electrochemical Surface Science
  • Pulsed Power and Plasma Physics.
  • Regression Analysis.