Patterning of Thick Parylene Films by Oxygen Plasma for Application as Exploding Foil Initiator Flyer Material

Abstract

Parylene is an attractive flyer material for the exploding foil initiator due to its superior conformal step coverage and inert properties. A process for patterning thick films of Parylene using a thin metal masking layer and oxygen plasma has been developed. Gold and titanium have been compared as masking materials on the basis of masking quality and compatibility with existing processes. Etch rate, directionality, and minimum feature size have been approximated for isotropic and anisotropic oxygen plasma etch recipes. Remaining obstacles to process integration are discussed.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2009
Accession Number
ADA506670

Entities

People

  • Eugene S. Zakar
  • Michael D. Grapes

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Electron Microscopy
  • Elements
  • Explosive Trains
  • Explosives
  • Explosives Initiators
  • Films
  • Materials
  • Metals
  • Microelectromechanical Systems
  • Microscopes
  • Phase
  • Polymers
  • Scanning Electron Microscopy
  • Surface Roughness
  • Thick Films
  • Thin Films
  • Titanium

Readers

  • Computational Modeling and Simulation
  • Polymer Science and Engineering.
  • Semiconductor Device Technology