Micromechanics of Damage Accumulation in Micro- and Nano-Scale Laminates for Microelectromechanical Systems

Abstract

In this program we used a combination of microscale mechanical testing methods and nanoindentation to ascertain the deformation, fracture, and fatigue properties of the materials. A variety of materials characterization tools were then used to establish the chemistry)' and structure of the films. This study has revealed that the stability of nanograined metals, especially in the presence of cyclic loading, is poor in comparison to coarser (micron-scale) grained materials. Moreover, the future of microelectromechanical systems that contain nanograined noble metals and their long-term durability hinges on a thorough understanding of these phenomena and strategies to mitigate the degradation. Significant, additional studies will be required to mitigate this threat to the performance of MEMS in critical defense applications.

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Document Details

Document Type
Technical Report
Publication Date
Apr 06, 2009
Accession Number
ADA510313

Entities

People

  • Christopher L. Muhlstein

Organizations

  • Pennsylvania State University

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemistry
  • Crystal Structure
  • Data Analysis
  • Elastic Properties
  • Failure Mode And Effect Analysis
  • Laminates
  • Mass Spectrometry
  • Materials
  • Materials Processing
  • Materials Science
  • Materials Testing
  • Mechanical Working
  • Mechanics
  • Microelectromechanical Systems
  • Modulus Of Elasticity
  • Spectrometry
  • Tensile Strength

Fields of Study

  • Materials science

Readers

  • Integrated Circuit Design and Technology.
  • Joint Military Operations and Doctrine.
  • Structural Health Monitoring of Composite Structures.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems