Feasibility of Biodegradable MEMS Based on Cellulose Paper

Abstract

This report covers investigations of adhesive coatings, contact pressures, and depth control of micro-transfer printing (MTP) on Electro-Active paper (EAPap) and the micro-molding of cellulose EAPap, suitable to production of micro-electronics, such as inertia sensors.

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Document Details

Document Type
Technical Report
Publication Date
Dec 16, 2009
Accession Number
ADA510941

Entities

People

  • Jaehwan Kim

Organizations

  • Inha University

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Acoustic Waves
  • Adhesives
  • Cellulose
  • Depth
  • Depth Control
  • Detectors
  • Electric Fields
  • Electron Microscopy
  • Electronics
  • Fabrication
  • Materials
  • Piezoelectricity
  • Printing
  • Semiconductors
  • Surface Acoustic Waves
  • Transducers
  • Transmission Electron Microscopy

Fields of Study

  • Engineering
  • Materials science

Readers

  • Aerospace Test and Evaluation
  • Integrated Circuit Design and Technology.
  • Nanocomposite Materials Science

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems