CMOS-Compatible Piezoelectric Microphone

Abstract

Piezoelectric Microphone: advantageous over condenser microphone except sensitivity; Major Sensitivity-Limiting Factor in Piezoelectric Microphone: residual stress in the diaphragm; Modeled and demonstrated stress releasing effect of corrugations; Fabricated and tested piezoelectric microphones with/without corrugation; Expected Sensitivity of Piezoelectric Microphone: 220 mV/mbar or 2.2 mV/Pa.

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1999
Accession Number
ADA511148

Entities

People

  • Eun S. Kim

Organizations

  • University of Hawaiʻi at Mānoa

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Ceramic Materials
  • Dynamic Range
  • Electrical Engineering
  • Engineering
  • Fabrication
  • Information Operations
  • Microphones
  • Residual Stress
  • Residuals
  • Sensitivity
  • Skeletal Muscle
  • Standards
  • Stresses
  • Universities

Readers

  • Fluid Dynamics.
  • Nanofabrication and Microfabrication.
  • Structural Health Monitoring of Composite Structures.