MEMS Microphones at Draper
Abstract
Draper has developed high sensitivity MEMS condenser microphones that have on-chip JFET amplifiers to reduce stray capacitance, single-crystal silicon diaphragms, and electroplated perforated bridge electrodes. A Si3N4 membrane fabrication process also was developed. Custom designs for ultrasound or infrasound are possible, and arrays can be built as easily as one sensor can. The technology is licensed to NCT, National Semiconductor, and Siemens (Munich).
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 1999
- Accession Number
- ADA511149
Entities
People
- Jonathan Bernstein
Organizations
- Charles Stark Draper Laboratory