A High Performance MEMS Thin-Film Teflon Electret Microphone

Abstract

Micromachined Electret Condensor Microphone: 1. Requires no external power source (self-biasing) 2. Can be mm-scale with high sensitivity (10+ mV/Pa) 3. Integrable with on-chip electronics 4. Mass producible like ICs...low cost, high yield 5. Structurally simple...increased reliability.

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Document Details

Document Type
Technical Report
Publication Date
Aug 24, 1999
Accession Number
ADA512912

Entities

People

  • Yu-chong Tai

Organizations

  • California Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Acoustic Propagation
  • Acoustics
  • Air Filters
  • Charge Density
  • Dynamic Range
  • Electrets
  • Electrical Engineering
  • Electron Beams
  • Electronics
  • Films
  • Frequency
  • Frequency Response
  • Materials
  • Microelectromechanical Systems
  • Microphones
  • Thin Films

Readers

  • Acoustics.
  • Integrated Circuit Design and Technology.
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems