All Surface Micromachined Microphone

Abstract

All Surface Micromachined Microphones. Advantages: 1. Freedom of Design, more functionality 2. Very Suitable for Integration with electronics 3. Well-established Commercial Process 4. Foundries. Disadvantages: 1. Small Gaps, damping - solved by Out of Plane Structures 2. Some Assembly Required - solved by Self Assembling.

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Document Details

Document Type
Technical Report
Publication Date
Aug 24, 1999
Accession Number
ADA512914

Entities

People

  • Flavio Pardo

Tags

Communities of Interest

  • Materials and Manufacturing Processes
  • Sensors

DTIC Thesaurus Topics

  • Abstracts
  • Amplifiers
  • Assembly
  • Bandpass Amplifiers
  • Demodulators
  • Detection
  • Detectors
  • Electronics
  • Experimental Data
  • Frequency
  • Frequency Response
  • Images
  • Information Operations
  • Instructions
  • Microphones
  • Microsensors
  • Standards

Readers

  • Economics
  • Integrated Circuit Design and Technology.
  • Structural Dynamics.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems