DC-GHz Micromachined Capacitive Air Transducers

Abstract

Surface micromachining can achieve low frequency (20-200 kHz) receivers. A broadband detection scheme allows operation over dc-GHz range. 1-D and 2-D arrays enable direction sensing. Through-wafer vias enable integration to electronics via flip-chip bonding.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Aug 24, 1999
Accession Number
ADA512915

Entities

People

  • A. S. Ergun
  • B. T. Khuri-yakub
  • F. L. Degertekin

Organizations

  • Stanford University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Acoustic Propagation
  • Broadband
  • Detection
  • Dynamic Range
  • Electronics
  • Fabrication
  • Flip Chips
  • Frequency
  • Image Processing
  • Micro-Machines
  • Micromachining
  • Sound Waves
  • Strip Transmission Lines
  • Transducers
  • Transmission Lines
  • Two Dimensional
  • Universities

Readers

  • Integrated Circuit Design and Technology.
  • Radar Systems Engineering.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems