Power MEMS Development

Abstract

The resettable circuit breaker cantilevers use silicon dioxide (SiO2) for temperature compensation. The compressive stress in the SiO2 causes the cantilever to bow upwards 400 um after release. In the DC-DC voltage converter the gap between the electrodes is 1.4 um. After release, the cantilevers are stuck down. We devised a short loop experiment to better understand the cantilever behavior by omitting the contact metal and SiO2 layers from test cantilevers.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2010
Accession Number
ADA513759

Entities

People

  • John Bumgarner

Organizations

  • SRI International

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Ceramic Materials
  • Charge Density
  • Charged Particles
  • Circuit Breakers
  • Converters
  • Diamond Films
  • Electrodes
  • Fabrication
  • Films
  • Frequency
  • Heat Sinks
  • Magnetic Fields
  • Materials
  • Materials Processing
  • Measurement
  • Profilometers
  • Thermal Conductivity

Readers

  • Combustion Dynamics and Shock Wave Physics.
  • Electrical Engineering
  • Nanofabrication and Microfabrication.