CVD Synthesis and Characterization of Graphene Thin Films

Abstract

We demonstrated a method for producing high-quality, few-layer graphene over large areas via chemical vapor deposition (CVD). Graphene growth was achieved by the flow of methane and hydrogen gasses over a nickel thin film acting as catalyst at ambient pressure. Optimal growth conditions were found by varying the following parameters: methane flow rate, nickel film thickness, cooling rate, and temperature. A transfer process was developed through treatment with a nickel etchant solution to isolate the graphene for placement on an oxidized silicon substrate. Transfer methods are essential for effective optical contrast and atomic force microscopy measurements. Characterization was performed with optical microscopy, Raman spectroscopy, and atomic force microscopy to determine the number and quality of layers. Results have shown noticeable differences in Raman signals and optical color contrast between graphene and graphite, as well as distinctions between single-to-few- and multi-layer graphene.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2010
Accession Number
ADA513793

Entities

People

  • Barbara Nichols
  • Matthew N O'Brien

Organizations

  • United States Army Research Laboratory

Tags

DTIC Thesaurus Topics

  • Carbon Nanotubes
  • Chemical Vapor Deposition
  • Composite Materials
  • Films
  • Flow Rate
  • Fullerenes
  • Graphene
  • Graphitic Materials
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Microscopy
  • Power Electronics
  • Raman Spectroscopy
  • Spectroscopy
  • Thin Films
  • Vapor Deposition

Readers

  • Combustion and Flow Dynamics.
  • Nanocomposite Materials Science
  • Surface Engineering/Surface Coating Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene