A Note on Determining the Electron Distribution Function from RF Impedance Probe Measurements

Abstract

We have demonstrated in earlier work the usefulness of a network analyzer in plasma diagnostics using spherical probes in the thin sheath limit. The rf signal applied to the probe by the network analyzer is small in magnitude compared to probe bias voltages and the instrument returns both real and imaginary parts of the complex plasma impedance as a function of frequency for given bias voltages. This information can be used to determine sheath resistance, sheath density profiles, and a technique for measuring electron temperature.

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Document Details

Document Type
Technical Report
Publication Date
Feb 17, 2010
Accession Number
ADA518666

Entities

People

  • D. N. Walker
  • David D. Blackwell
  • Richard F. Fernsler
  • William E. Amatucci

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Analyzers
  • Capacitance
  • Charged Particles
  • Coaxial Cables
  • Distribution Functions
  • Electron Density
  • Electrons
  • Equations
  • Frequency
  • Impedance
  • Langmuir Probes
  • Magnetic Fields
  • Measurement
  • Military Research
  • Physical Theories
  • Plasma Diagnostics
  • Poisson Equation

Fields of Study

  • Physics

Readers

  • Microwave Engineering.
  • Plasma Physics / Magnetohydrodynamics

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems