Effects of Hydrogen Pretreatment on Physical-Vapor-Deposited Nickel Catalyst for Multi-Walled Carbon Nanotube Growth
Abstract
Physical vapor deposited nickel catalyst layers of 10, 50, 100, 200, 350, and 500 angstrom were granulated using hydrogen plasma for varying times to determine an effective carbon nanotube (CNT) growth process using microwave plasma enhanced CVD (MPECVD). Nickel was deposited via sputtering or evaporation. The catalyst granule size, density, and resulting CNTs were analyzed. Sputtered nickel of 50 angstrom with 5 minutes of hydrogen plasma pretreatment resulted in the most effective CNT growth.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 17, 2010
- Accession Number
- ADA519169
Entities
People
- Benjamin L. Crossley
- Lavern A. Starman
- Mauricio Kossler
- Peter J. Collins
- Ronald A. Coutu Jr.
Organizations
- Air Force Institute of Technology