A Procedure to Determine and Correct for Transmission Line Resistances for Direct Current On-Wafer Measurements

Abstract

In this technical note, a procedure is presented that can be used to determine the intrinsic line resistances between a two-port power supply and a device under test (DUT). In order to make an accurate on wafer direct current (DC) measurement, it is necessary to determine the voltages at the terminals of the DUT. As the amount of current that semiconductor devices are capable of handling increases, the voltage drop due to line losses will also increase. A handful of measurements can be used to determine the line resistance, and by using a simple algorithm, the voltage across the DUT can be calculated.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 2010
Accession Number
ADA520609

Entities

People

  • Benjamin D. Huebschman

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Bipolar Junction Transistors
  • Direct Current
  • Electron Mobility
  • Electronics Laboratories
  • Field Effect Transistors
  • High Electron Mobility Transistors
  • Measurement
  • Measuring Instruments
  • Metal Oxide Semiconductors
  • Power Supplies
  • Resistance
  • Semiconductor Devices
  • Semiconductors
  • Transistors
  • Transmission Lines
  • Voltage

Readers

  • Aerospace Test and Evaluation
  • Integrated Circuit Design and Technology.
  • Microwave Engineering.

Technology Areas

  • Microelectronics