AFOSR Wafer Bonding
Abstract
The concept of a Bonded Field-Effect Transistor has been successfully demonstrated, using an InGaAs/InAlAs MESFET Source/Gate region with an InGaN/GaN drain region. Bonding other material combinations such as Si-GaP and Si-GaN have been attempted and explored. Material non-uniformity severely impacts the ability of GaN to bond, and several process developments have been made to attempt to overcome this issue. Many possibilities exist for the continued exploration of this new class of devices, promising both high-frequency and high-voltage operation.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 31, 2009
- Accession Number
- ADA522052
Entities
People
- Umesh Mishra
Organizations
- University of California, Santa Barbara