A Rotary Microactuator Supported on Encapsulated Microball Bearings using an Electro-Pneumatic Thrust Balance

Abstract

The development of a rotary microactuator supported on encapsulated microball bearings and driven by electro-pneumatic actuation is reported. The encapsulated bearing provides full support to an encased rotor, while an electro-pneumatic thrust balance is used to minimize rotor normal load. By minimizing normal load, bearing friction is reduced leading to increased speed and performance. Experimental results show that the microactuator is capable of repeatable operation and continuous 360 degrees motion at speeds of 5 - 2000 rpm. This is the first demonstration of a ball bearing supported electrostatic microactuator with a fully encased rotor, capable of direct mechanical attachment or reliable interaction with external media.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2009
Accession Number
ADA522990

Entities

People

  • C. M. Waits
  • Matthew Mccarthy
  • Mustafa I. Beyaz
  • Reza Ghodssi

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics
  • Air Platforms

DTIC Thesaurus Topics

  • Accuracy
  • Actuators
  • Angular Motion
  • Assembly
  • Attachment
  • Ball Bearings
  • Bearings
  • Elements
  • Engineering
  • Fabrication
  • Failure Mode And Effect Analysis
  • Friction
  • Manufacturing
  • Mechanical Engineering
  • Microelectromechanical Systems
  • Micromachining
  • Silicon Carbide

Fields of Study

  • Engineering
  • Physics

Readers

  • Robotics and Automation.
  • Tribology (the study of the boundary interaction between sliding surfaces, lubrication, wear and friction).