Growth Control of Carbon Nanowalls

Abstract

Growth mechanisms of carbon nanowalls for electronic device applications were explored. Properties investigated include morphology control, position-controlled growth, and control of their electrical property. During the course of this work, carbon nanowalls were successfully grown by the simultaneous irradiation of fluorocarbon radicals, hydrogen atoms, and Ar ions and it was confirmed that the ion bombardment is crucial for the nucleation of carbon nanowalls. Additionally, carbon nanowalls were grown area-selectively on the substrate through using patterned catalyst or with the help of deep trenches. The nucleation rate of carbon nanowalls depended on the class and forms of substrate materials. The growth of carbon nanowalls was enhanced on the Ti thin layer. Similar enhancement was observed on the thin layer or nanoparticles of Co, Pt and Fe.

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Document Details

Document Type
Technical Report
Publication Date
Jul 19, 2010
Accession Number
ADA524326

Entities

People

  • Mineo Hiramatsu

Organizations

  • Meijo University

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Catalysts
  • Chemical Vapor Deposition
  • Electrical Properties
  • Films
  • Flow Rate
  • Fluorinated Hydrocarbons
  • Fluoropolymers
  • Graphene
  • Ion Bombardment
  • Ion Sources
  • Materials
  • Materials Processing
  • Materials Science
  • Nanomaterials
  • Nanoparticles
  • Nanostructures
  • Nucleation

Fields of Study

  • Materials science

Readers

  • Nanocomposite Materials Science
  • Thin Film Deposition Science.

Technology Areas

  • Biotechnology
  • Microelectronics
  • Microelectronics - Graphene