Hierarchical Assembly and Compliance of Aligned Nanoscale Polymer Cylinders in Confinement

Abstract

We report a combined top-down/bottom-up hierarchical approach to fabricate massively parallel arrays of aligned nanoscale domains by means of the self-assembly of asymmetric polystyrene-block-poly(ethylene-alt-propylene) diblock copolymers. Silicon nitride grating substrates of various depths and periodicities are used to template the alignment of the high-aspect-ratio cylindrical polymer domains. Alignment is nucleated by polystyrene preferentially wetting the trough sidewalls and is thermally extended throughout the polymer film by defect annihilation. Topics discussed include a detailed analysis of the capacity of this system to accommodate lithographic defects and observations of alignment beyond the confined channel volumes. This graphoepitaxial methodology can be exploited in hybrid hard/soft condensed matter systems for a variety of applications.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2004
Accession Number
ADA525838

Entities

People

  • Deepak Sundrani
  • S. B. Darling
  • S. J. Sibener

Organizations

  • University of Chicago

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Alkenes
  • Assembly
  • Block Copolymers
  • Ceramic Materials
  • Chemical Synthesis
  • Chemistry
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Materials Testing
  • Periodic Variations
  • Polymeric Films
  • Polymers
  • Self Assembly
  • Thick Films
  • Thin Films

Fields of Study

  • Materials science
  • Physics

Readers

  • Mechanical Engineering/Mechanics of Materials.
  • Nanofabrication and Microfabrication.
  • Neural Network Machine Learning.

Technology Areas

  • Microelectronics