Extraordinary Transmission in the UV Range from Sub-wavelength Slits on Semiconductors

Abstract

In this paper we describe a way to achieve the extraordinary transmission regime from sub-wavelength slits carved on semiconductor substrates. Unlike metals, the dielectric permittivity of typical semiconductors like GaAs or GaP is negative beginning in the extreme UV range (lambda less than or equal to 270nm). We show that the metal-like response of bulk semiconductors exhibits surface plasmon waves that lead to extraordinary transmission in the UV and soft X-ray ranges. The importance of realistic material response versus perfect conductors is also discussed. These findings may be important in high resolution photo-lithography, near field optical devices and ultra high density optical storage.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 2010
Accession Number
ADA526570

Entities

People

  • D. De Ceglia
  • M. A. Vincenti
  • M. Buncick
  • M. J. Bloemer
  • M. Scalora
  • N. Aközbek

Organizations

  • United States Army Research, Development and Engineering Command

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Dielectric Permittivity
  • Frequency
  • Magnetic Fields
  • Materials
  • Metamaterial Absorbers
  • Metamaterials
  • Near Field
  • Optical Properties
  • Plasmons
  • Polaritons
  • Semiconductors
  • Soft X Rays
  • Substrates
  • Surface Plasmons
  • Surface Waves
  • Tunable Metamaterials
  • X Rays

Fields of Study

  • Materials science
  • Physics

Readers

  • Microwave Engineering.
  • Nanofabrication and Microfabrication.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics