Comparison of Gold/Platinum and Gold/Ruthenium Contacts on Piezoelectrically Actuated RF MEMS Switches

Abstract

Lead zirconate titanite (PZT) radio frequency (RF) microelectromechanical system (MEMS) switches developed at the U.S. Army Research Laboratory (ARL) were fabricated with half of the switches on each wafer-approximately 30 switches-using the typical gold/platinum contacts and using gold (Au)/ruthenium (Ru) contacts for the other half. We measured several important parameters using an Electroglass automated probe station, including contact resistance, actuation voltage, and bias current. The switches were cycled a number of times and the measurements were repeated. In addition, samples of five switches of each type were cycled to failure, and the mean output voltage was logged to assess the effect of these contact materials on the lifetime.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 2010
Accession Number
ADA527674

Entities

People

  • Daniel Judy
  • Jeffrey S. Pulskamp
  • Robert Proie
  • Ronald G. Polcawich

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Bipolar Junction Transistors
  • Ceramic Materials
  • Complementary Metal-Oxide Semiconductors
  • Electric Fields
  • Electronics Laboratories
  • Field Effect Transistors
  • Frequency
  • Materials
  • Measurement
  • Metal Oxide Semiconductors
  • Metals
  • Microelectromechanical Systems
  • Military Research
  • Modules (Electronics)
  • Radio Frequency
  • Resistance
  • Semiconductors

Readers

  • Electrical Engineering
  • Materials Science and Engineering.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems