Integration of IC Foundries and MEMS Fabrication

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 2009
Accession Number
ADA529231

Entities

People

  • Michael Gaitan

Organizations

  • National Institute of Standards and Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Accelerometers
  • Acoustics
  • Actuators
  • Deformable Mirrors
  • Fabrication
  • Information Operations
  • Manufacturing
  • Micro-Machines
  • Microelectromechanical Systems
  • Micromachining
  • Standards
  • Universities