Design and Analysis of MEMS Based PVDF Ultrasonic Transducers for Vascular Imaging

Abstract

Polyvinilidene fluoride (PVDF) single-element transducers for high-frequency (>30 MHz) ultrasound imaging applications have been developed using MEMS (Micro-electro-Mechanical Systems) compatible techniques. Performance of these transducers has been investigated by analyzing the sources and effects of on-chip parasitic capacitances on the insertion-loss of the transducers. Modeling and experimental studies showed that on-chip parasitic capacitances degraded the performance of the transducers and an improved method of fabrication was suggested and new devices were built. New devices developed with minimal parasitic effects were shown to improve the performance significantly. A 1-mm aperture PVDF device developed with minimal parasitic effects has resulted in a reduction of insertion loss of 21 dB compared with devices fabricated using a previous method.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2010
Accession Number
ADA529797

Entities

People

  • Aaron Fleischman
  • Chaitanya Chandrana
  • James Talman
  • Shuvo Roy
  • Tao Pan

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Pressure
  • Capacitance
  • Ceramic Materials
  • Electrical Impedance
  • Electronic Mail
  • Electronics
  • Fabrication
  • Films
  • Frequency
  • Impedance
  • Insertion Loss
  • Losses
  • Measurement
  • Microelectromechanical Systems
  • Microelectronics
  • Printed Circuits
  • Transducers

Readers

  • Acoustics.
  • Materials Science and Engineering.
  • Optical Physics and Photonics.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems