High-impedance Buffer Amplifier For Micro-electromechanical System (MEMS) Resonator Measurements

Abstract

The electrical performance of micro-electromechanical system (MEMS) resonators built at the U.S. Army Research Laboratory (ARL) requires measurement techniques that do not overstress the devices. As a result, we need a high-impedance amplifier that operates over an extended frequency range suitable for use ahead of a 50-ohm vector network analyzer (VNA). The prototype amplifier "buffers" the resonator from the VNA. This amplifier was designed, fabricated, and tested during a fourweek period. It demonstrates that future designs using operational amplifiers with wider frequency ranges will be suitable for this application.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2010
Accession Number
ADA531283

Entities

People

  • Brianna Murphy
  • Roger Kaul

Organizations

  • United States Army Research Laboratory

Tags

DTIC Thesaurus Topics

  • Amplifiers
  • Analyzers
  • Dynamic Range
  • Frequency
  • Impedance
  • Measurement
  • Microelectromechanical Systems
  • Military Research
  • Models
  • Operational Amplifiers
  • Prototypes
  • Resonators
  • Simulations
  • Universities

Fields of Study

  • Physics

Readers

  • Electrical Engineering
  • Electronics Engineering
  • Nanoscale Plasmonic Nanotechnology

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems