Gas/Surface Interaction Study Applied to Si-based Materials Used in Driven Micro- and Nano-scale devices
Abstract
This report results from a contract tasking Ural State University as follows: The contractor will investigate an experimental study of momentum and energy accommodation of monatomic and polyatomic gases on a controlled primary silicon based surface. The motivation for the proposed work is that the process of energy and momentum exchange between gas molecules and surface atoms plays an essential role in operation of current and future micro- and nano-scale devices (MEMS) as well as in other applied problems of rarefied gas dynamics. Main focus is development of experimental approaches based on gas flow technique (both for isothermal and non-isothermal conditions) and measurements of energy and momentum accommodation coefficients. Special attention in the project will be paid to surface microscopic structure and chemical composition effect on gas dynamic characteristics.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2008
- Accession Number
- ADA531809
Entities
People
- Sergey Borisov