Recent Advances in High-Resolution MEMS DM Fabrication and Integration

Abstract

Deformable mirrors fabricated using microelectromechanical systems technology (MEMS-DMs) have been studied at Boston University (BU) and developed/commercialized by Boston Micromachines Corporation (BMC) over the past decade. Recent advances that might have an impact on surveillance telescopes include demonstration of 4092 actuator DMs with continuous mirror face-sheets, and segmented DMs capable of frame rates of greater than 20kHz for devices with up to 1020 independent segments. The 4092 actuator DM, developed by BMC for the Gemini Planet Imaging GPI instrument, was recently delivered to the GPI instrument development team. Its packaging and platform development are described, and the performance results for the latest prototype devices are presented.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2010
Accession Number
ADA531832

Entities

People

  • Paul Bierden
  • Steven Cornelissen
  • Thomas Bifano

Organizations

  • Boston University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Actuators
  • Batch Processing
  • Boundary Layer
  • Closed Loop Systems
  • Control Systems
  • Corporations
  • Dynamic Response
  • Electronics
  • Energy Consumption
  • Fabrication
  • Films
  • Frequency
  • High Density
  • High Resolution
  • Mirrors
  • Resonant Frequency
  • Segmented

Fields of Study

  • Physics

Readers

  • Astronomy and Astrophysics.
  • Clinical Trial Research.
  • Robotics and Automation.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems
  • Space
  • Space - Space Objects