High Actuator Count MEMS Deformable Mirrors for Space Telescopes

Abstract

Micro Electro Mechanical Systems (MEMS) deformable mirrors are capable of correcting aberrations in space-based optical imaging systems. The small size, weight, and power requirements are ideal for space based adaptive optics. However, the yield, number of actuators, and surface accuracies can be improved. Yield is the proportion of the mirror segments that work. A low-power driver is also needed. The impact of microscopic manufacturing defects and substrate bowing were investigated. To reduce power consumption in the drive electronics, a multiplexed driver was investigated. A prototype of the multiplexed driver was constructed and will be used for future tests on a deformable mirror.

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Document Details

Document Type
Technical Report
Publication Date
Jun 07, 2010
Accession Number
ADA536144

Entities

People

  • Jason Stewart
  • Steven Cornelissen
  • Tom Bifano

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Actuators
  • Adaptive Optics
  • Amplifiers
  • Analog Signals
  • Bending Moments
  • Deformable Mirrors
  • Electronics
  • Energy Consumption
  • Fabrication
  • High Voltage
  • Manufacturing
  • Mirrors
  • Optics
  • Space Based
  • Substrates
  • Telescopes
  • Voltage

Fields of Study

  • Physics

Readers

  • Image Processing and Computer Vision.
  • Nanoscale Plasmonic Nanotechnology
  • Optical Fiber Sensing and Electromagnetic Propagation.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems
  • Space