Wafer-scale Reduced Graphene Oxide Films for Nanomechanical Devices

Abstract

We report a process to form large-area, few-monolayer graphene oxide films and then recover the outstanding mechanical properties found in graphene to fabricate high Young's modulus (<E> = 185 GPa), low-density nanomechanical resonators. Wafer-scale films as thin as 4 nm are sufficiently robust that they can be delaminated intact and resuspended on a bed of pillars or field of holes. From these films, we demonstrate radio frequency resonators with quality factors (up to 4000) and figures of merit (fxQ > 10(exp 11)) well exceeding those of pure graphene resonators reported to date. These films' ability to withstand high in-plane tension (up to 5 N/m) as well as their high Q-values reveals that film integrity is enhanced by platelet-platelet bonding unavailable in pure graphite.

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 2008
Accession Number
ADA536703

Entities

People

  • Brian H. Houston
  • Eric S. Snow
  • Jeffrey W. Baldwin
  • Jeremy T. Robinson
  • Maxim Zalalutdinov
  • Paul E Sheehan
  • Zhongqing Wei

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Annealing
  • Chemistry
  • Elastic Properties
  • Fabrication
  • Films
  • Frequency
  • Frequency Response
  • Materials
  • Materials Science
  • Mechanical Properties
  • Membranes
  • Military Research
  • Modulus Of Elasticity
  • Oxide Films
  • Oxides
  • Resonators
  • Substrates

Fields of Study

  • Physics

Readers

  • Nanoscale Plasmonic Nanotechnology
  • Powder metallurgy of Titanium alloys.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene