Wafer-scale Reduced Graphene Oxide Films for Nanomechanical Devices
Abstract
We report a process to form large-area, few-monolayer graphene oxide films and then recover the outstanding mechanical properties found in graphene to fabricate high Young's modulus (<E> = 185 GPa), low-density nanomechanical resonators. Wafer-scale films as thin as 4 nm are sufficiently robust that they can be delaminated intact and resuspended on a bed of pillars or field of holes. From these films, we demonstrate radio frequency resonators with quality factors (up to 4000) and figures of merit (fxQ > 10(exp 11)) well exceeding those of pure graphene resonators reported to date. These films' ability to withstand high in-plane tension (up to 5 N/m) as well as their high Q-values reveals that film integrity is enhanced by platelet-platelet bonding unavailable in pure graphite.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 2008
- Accession Number
- ADA536703
Entities
People
- Brian H. Houston
- Eric S. Snow
- Jeffrey W. Baldwin
- Jeremy T. Robinson
- Maxim Zalalutdinov
- Paul E Sheehan
- Zhongqing Wei
Organizations
- United States Naval Research Laboratory