Hybrid Organic-Inorganic Films Grown Using Molecular Layer Deposition

Abstract

This short report will first review several MLD systems that have been demonstrated to illustrate the current state-of-the-art. Some new systems will then be introduced to show the diversity of chemistries that can be employed to grow various hybrid organic-inorganic films. Lastly, speculations will be offered on the future prospects for the MLD of hybrid organic-inorganic materials.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 2011
Accession Number
ADA540366

Entities

People

  • Steven M. George

Organizations

  • University of Colorado Boulder

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Advanced Materials
  • Anhydrides
  • Chemical Engineering
  • Chemical Synthesis
  • Chemistry
  • Films
  • Inorganic Materials
  • Materials
  • Materials Processing
  • Materials Science
  • Measurement
  • Mechanical Properties
  • Organic Chemistry
  • Polymers
  • Quartz Crystal Microbalances
  • Silicon Compounds
  • Surface Reactions

Readers

  • Solar Photovoltaics and Thermoelectric Devices.
  • Surface Coatings Technology.
  • Systems Analysis and Design