Power MEMS Development
Abstract
The objective of the research in this task was to demonstrate the feasibility of using microelectromechanical system (MEMS) switches as a circuit breaker for electric power management. The concept is to use electrostatically actuated MEMS cantilever switches with integrated bimorph structures to create vertical switches with the capacity to automatically interrupt current flow when over-current situations arise. Using electrostatic actuation, we will be able to reset the circuit breaker following the current interrupt condition. We developed switch designs and manufacturing process flows for device fabrication, and tested and packaged prototype resettable circuit breakers.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 2011
- Accession Number
- ADA544607
Entities
People
- Drew Hanser
Organizations
- SRI International