Carbon Nanotube Field Emission Arrays

Abstract

This effort exploits the unique physical and electrical characteristics of carbon nanotubes (CNTs) for field emission applications. Carbon nanotube field emission devices are designed, fabricated, and tested. Two reliable CNT synthesis methods, microwave plasma enhanced chemical vapor deposition (MPE-CVD) and thermal chemical vapor deposition (T-CVD), are developed. The physical properties of the resulting CNTs are analyzed using Raman spectroscopy and Scanning electron microscopy (SEM) and then tested for field emission performance. The T-CVD grown CNTs are shown to have fewer growth defects, but suffer from less process control making integration into devices difficult without further process development. Field emission testing shows the T-CVD CNTs to be much better emitters, exceeding 13 mA/cm2 at an electric field of only 1.4 V/micrometer, while the best MPE-CVD CNTs only managed ~1 mA/cm2 at the much higher electric field of 4.56 V/micrometer. Two methods of device fabrication, conventional photolithography and nanosphere lithography, are developed and used to fabricate gated field emission arrays. Finite element analysis is used to optimize the gated array design to maximize the electric field strength. All fabrication steps are successfully demonstrated and prototype devices tested and compared to simple CNT carpet samples showing marked improvements by reducing electrostatic screening effects.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 2011
Accession Number
ADA545307

Entities

People

  • Benjamin L. Crossley

Organizations

  • Air Force Institute of Technology

Tags

DTIC Thesaurus Topics

  • Band Structures
  • Carbon Nanotubes
  • Chemical Synthesis
  • Chemical Vapor Deposition
  • Chemistry
  • Electric Arcs
  • Emitters
  • Energy Bands
  • Fullerenes
  • Graphene
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Materials Testing
  • Nanotechnology
  • Physical Properties

Fields of Study

  • Materials science

Readers

  • Manufacturing Engineering.
  • Nanocomposite Materials Science
  • Plasma Physics.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene