A Computational Investigation of Nanoelectromechnical Switches
Abstract
The International Technology Roadmap for Semiconductors (ITRS) identifies emerging technologies with the potential to sustain Moore's Law. A necessary succession from planar CMOS to non-planar/dual-gate CMOS, and ultimately to novel architectures such as carbon nanotube-(CNT)-based nanoelectromechanical systems (NEMS) is envisioned. The ITRS also identifies critical roadblocks currently precluding advances beyond CMOS. Primary among the roadblocks to NEMS are poor reliability and manufacturing challenges. Here we investigate, both computationally and experimentally, the prevalent failure modes of CNT-based NEMS that hamper reliability. We first identify their point of onset within the design space, highlighting the extremely limited region in which failure is currently avoided. We use dynamic multiphysics models to elucidate the underlying causes of failure, and then show that the usable design space expands dramatically when employing novel electrode materials such as diamond-like carbon. We then demonstrate the efficacy of this solution through numerous successive actuation cycles without failure and applications to volatile memory operations. Finally, we develop a probe-based nanomanufacturing scheme by which to scale up manufacturing of these robust devices. Ultimately, these advances will be critical in delivering a broad class of robust, battle-ready NEMS sensors and electronics.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 12, 2011
- Accession Number
- ADA545996
Entities
People
- Horacio D Espinosa
Organizations
- Northwestern University