MEMS Based Thermopile Infrared Detector Array for Chemical and Biological Sensing
Abstract
Black Forest Engineering's (BFE's) objective of the Phase I effort was to develop thermopile infrared detector linear arrays meeting the requirements of chemical and biological sensing such as Foster-Miller's Infrared Bio-Aerosol Threat Alert (IBATA) system. BFE's thermopile fabrication objective is to use materials and processes compatible with standard silicon based integrated circuit foundries in order to reduce cost. The fabrication of silicon-based thermopiles, differentially coupled with advanced BFE CMOS readout integrated circuitry (ROIC), will provide DOD with rugged, inexpensive, and high performance infrared sensing capabilities. The Phase I design objective was to implement a ? 64-channel linear array with 0.5 mm pitch and > 90% fill factor. The MEMs based LWIR (8-12 Jm) thermopile array will provide detectivity (D*) > 1 x 108 Jones, time constant < 35 msec and temperature coefficient of responsivity (TCR) < 0.04%/C. The thermopile resistance will be > 90 kOhms; compatible with BFE's low noise differential input circuitry. On Phase II the thermopile detector linear array can be fabricated and integrated with an existing BFE ROIC optimized for thermopile linear array readout.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 20, 2011
- Accession Number
- ADA547322
Entities
People
- Jim Gates
- Stephen Gaalema
- Stephen Van Duyne