Cathodoluminescence Study of the Properties of Stacking Faults in 4H-SiC Homoepitaxial Layers

Abstract

In-grown stacking faults in n-type 4H-SiC epitaxial layers have been investigated by real-color cathodoluminescence imaging and spectroscopy carried out at room and liquid helium temperatures. Stacking faults with 8H stacking order were observed, as well as double layer and multilayer 3C-SiC structures and a defect with an excitonic band gap at 2.635 eV. It was found that 8H stacking faults and triangular surface defects can be generated from similar nucleation sources. Time-resolved measurements reveal that compared to defect-free regions, the carrier lifetimes are severely reduced by the presence of stacking faults corresponding to triangular surface defects and three-dimensional 3C-SiC inclusions.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2009
Accession Number
ADA550039

Entities

People

  • Amitesh Shrivastava
  • Jaime A. Freitas Jr.
  • Paul B. Klein
  • Serguei I. Maximenko
  • Tangali S. Sudarshan

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Air Platforms

DTIC Thesaurus Topics

  • Band Gaps
  • Cathodoluminescence
  • Charge Coupled Devices
  • Chemical Vapor Deposition
  • Electron Beams
  • Electron Microscopy
  • Energy Bands
  • Images
  • Low Temperature
  • Luminescence
  • Materials
  • Measurement
  • Microscopes
  • Scanning Electron Microscopy
  • Semiconductors
  • Silicon Carbide
  • Three Dimensional

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene