Advanced Bonded Diamond for Optical Applications
Abstract
The customized CVD reactor has been successfully running for over 2 years. Some encouraging results have been achieved on it. Two important features of the reactor proved crucial, which are a motorized cooling stage and DC-biasing ability. The core component of the DC-biasing function is a ring shaped molybdenum (Moly) piece resting on a quartz cylinder. The Moly ring is electrically insulated from the stage, and can be DC biased to several hundreds of Volts. Because the Moly ring has contact with the chamber plasma, the plasma will be biased as a result. Therefore, the active carbon molecules inside the plasma will be accelerated and bombarded to the silicon substrate, which results in effective diamond seeding under certain conditions. This seeding method is called Biasing Enhanced Nucleation (BEN).
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 28, 2011
- Accession Number
- ADA553773
Entities
People
- Helmuth Meissner