Fabrication and Electromechanical Performance of a Novel High Modulus Ionogen Micro-Actuator

Abstract

In this work, a novel, high modulus sulfonated polymer is utilized as an ionomer for ionic liquid containing micro-ionic actuators (ionogel) is presented. The ionic polymer is composed of one-to-one ratio 4,6-bis(4-hydroxyphenyl)-N,N-diphenyl 1,3,5-triazin-2-amine and 4,4'-biphenol with bis(4-fluorophenyl) sulfone (DPA-PS:BP). The ionogel maintains a relatively higher modulus (700 MPa for 120 wt% of ionic liquid) compared to other widely used ionomers. High modulus of ionogel enables to realize thin films through solution casting. As an initial demonstration of a micro-ionic actuator, an ionic micro cantilever (200 microns x 33 microns x 5 microns) has been micromachined by using focused ion beam (FIB) milling on the substrate. The micro cantilever performance under DC actuation is tested using optical profilometer and a maximum tip displacement is 42 microns at 1.6V was obtained.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2011
Accession Number
ADA555186

Entities

People

  • Dean Tigelaar
  • Gokhan Hatipoglu
  • Mitra Yoonessi
  • Qiming Zhang
  • Srinivas Tadigadapa
  • Yang Liu

Organizations

  • Pennsylvania State University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Actuators
  • Chemistry
  • Dwell Time
  • Electrolytes
  • Energy Harvesting
  • Engineering
  • Fabrication
  • Films
  • Ion Beams
  • Ionic Liquids
  • Ions
  • Materials
  • Metal Matrix Composites
  • Microelectromechanical Systems
  • Modulus Of Elasticity
  • Physical Chemistry
  • Thin Films

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Nanoscale Plasmonic Nanotechnology
  • Polymer Science and Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems