Direct-Write Polymer Nanolithography in Ultra-High Vacuum

Abstract

Polymer nanostructures were directly written onto substrates in ultra-high vacuum. The polymer ink was coated onto atomic force microscope (AFM) probes that could be heated to control the ink viscosity. Then, the ink-coated probes were placed into an ultrahigh vacuum (UHV) AFM and used to write polymer nanostructures on surfaces, including surfaces cleaned in UHV. Controlling the writing speed of the tip enabled the control over the number of monolayers of the polymer ink deposited on the surface from a single to tens of monolayers, with higher writing speeds generating thinner polymer nanostructures. Deposition onto silicon oxideterminated substrates led to polymer chains standing upright on the surface, whereas deposition onto vacuum reconstructed silicon yielded polymer chains aligned along the surface.

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Document Details

Document Type
Technical Report
Publication Date
Jan 19, 2012
Accession Number
ADA555516

Entities

People

  • Arnaldo R. Laracuente
  • Lloyd J. Whitman
  • Minchul Yang
  • Paul E Sheehan
  • William P King
  • Woo-Kyung Lee

Organizations

  • United States Naval Research Laboratory

Tags

DTIC Thesaurus Topics

  • Chemistry
  • Films
  • High Vacuum
  • Lithography
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Melting Point
  • Molecules
  • Monomolecular Films
  • Nanolithography
  • Nanostructures
  • Nanotechnology
  • Polymers
  • Surface Chemistry
  • Vacuum

Fields of Study

  • Physics

Readers

  • Nanoscale Plasmonic Nanotechnology
  • Polymer Science and Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene