Silicon Carbide Capacitive High Temperature MEMS Strain Transducer

Abstract

Air Force Research Lab Air Vehicles directorate performs research on hypersonic vehicles. To verify materials or designs of hypersonic vehicles, they have a need to measure strain at temperatures exceeding 700 C. Strain sensors have the ability to measure strain. Strain is the deformation of materials due to internal stresses in a material. Internal stresses occur when a material is subjected to a force. Traditional strain sensors use Piezoresistive effects to measure strain, which is temperature dependent and making them unusable at high temperatures. This paper discusses a novel strain sensing device, sensing capacitance instead of piezoresistance. The strain sensor is modeled mathematically and simulated using Coventorware?. The results are presented here, along with recommendations for future work.

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Document Details

Document Type
Technical Report
Publication Date
Mar 22, 2012
Accession Number
ADA558292

Entities

People

  • Richard P. Weisenberger

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors
  • Weapons Technologies

DTIC Thesaurus Topics

  • Aerospace Craft
  • Air Force
  • Aircrafts
  • Ceramic Materials
  • Chemical Vapor Deposition
  • Dielectric Permittivity
  • Electromagnetic Fields
  • Fabrication
  • Manufacturing
  • Mechanical Structure
  • Metal-Semiconductor Junctions
  • Microelectromechanical Systems
  • Micromachining
  • Modulus Of Elasticity
  • Silicon Carbide
  • Stress Strain Relations
  • Voltage

Readers

  • Integrated Circuit Design and Technology.
  • Mechanical Engineering/Mechanics of Materials.
  • Military Science and Technology Research and Modernization.

Technology Areas

  • Hypersonics
  • Hypersonics - Hypersonic Flow