Integrated Thin-film Piezoelectric Traveling Wave Ultrasonic Motor

Abstract

An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors (USMs) at the millimeter-scale is being developed for low power, high torque motors for small-scale robotics, biomedical, and sensing applications. This paper describes the realization of ultrasonic motor stators ranging in diameter from 1?3 mm using wafer-scale micro-electromechanical system (MEMS) fabrication techniques with lead zirconate titanate (PZT) thin films. Using laser Doppler vibrometry (LDV), controlled traveling waves were demonstrated in the bulk silicon elastic medium of the stator and the standing wave behavior was characterized for control purposes. Furthermore, the resonant modes of the fabricated stators were modeled using finite element models, and the experimental results agree well with this analysis.

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 2011
Accession Number
ADA558626

Entities

People

  • Ryan Q. Rudy

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Diameters
  • Fabrication
  • Films
  • Frequency
  • Frequency Response
  • Manufacturing
  • Microelectromechanical Systems
  • Micromachining
  • Q Factor
  • Sine Waves
  • Square Waves
  • Standing Waves
  • Thin Films
  • Traveling Waves
  • Waveform Generators
  • Waveforms
  • Waves

Readers

  • Atmospheric Science / Meteorology, specifically Wind Wave Turbulence.
  • Integrated Circuit Design and Technology.
  • Materials Science and Engineering.

Technology Areas

  • AI & ML
  • Autonomy
  • Biotechnology
  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems