Operation of Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) Gyroscopic Sensor as a Two-Axis Accelerometer

Abstract

This report documents the idea or concept of operating an existing Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) gyroscopic sensor previously developed in the early-2000s under MEMS-Based Angular Rate Sensor (MBARS) and MicroControlled Array Sensors (mCAS). This report serves as documented evidence for future use of this open-sourced idea of the measurement of two-axis of linear acceleration from a previous sensor originally designed to operate as a single-axis rotation sensor.

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Document Details

Document Type
Technical Report
Publication Date
Apr 01, 2012
Accession Number
ADA559286

Entities

People

  • Michael S. Kranz
  • Tracy D. Hudson

Tags

Communities of Interest

  • Advanced Electronics
  • Materials and Manufacturing Processes
  • Sensors

DTIC Thesaurus Topics

  • Accelerometers
  • Amplitude
  • Control Systems
  • Demodulation
  • Dielectrics
  • Differential Equations
  • Displacement
  • Electronics
  • Engineering
  • Equations
  • Frequency
  • Measurement
  • Microelectromechanical Systems
  • Resonant Frequency
  • Rotation
  • Security
  • Vibration

Readers

  • Inertial Navigation Systems.
  • Integrated Circuit Design and Technology.
  • Theoretical Analysis.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems