High Quality Image Formation by Nonlocal Means Applied to High-Angle Annular Darkfield Scanning Transmission Electron Microscopy (HAADF-STEM)

Abstract

We outline a new systematic approach to extracting high quality information from HAADF-STEM images which will be beneficial to the characterization of beam sensitive materials. The idea is to treat several, possibly many low electron dose images with specially adapted digital image processing concepts at a minimum allowable spatial resolution. Our goal is to keep the overall cumulative electron dose as low as possible while still staying close to an acceptable level of physical resolution. We shall present the main conceptual imaging concepts and restoration methods that we believe are suitable for carrying out such a program and, in particular, allow one to correct special acquisition artifacts which result in blurring, aliasing, rastering distortions and noise.

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Document Details

Document Type
Technical Report
Publication Date
Dec 31, 2010
Accession Number
ADA560623

Entities

People

  • Douglas Blom
  • Francisco Blanco-silva
  • Peter Binev
  • Philipp Lamby
  • Robert Sharpley
  • Thomas Vogt
  • Wolfgang Dahmen

Organizations

  • University of South Carolina

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Acquisition
  • Algorithms
  • Distortion
  • Electron Microscopes
  • Electron Microscopy
  • Electrons
  • High Angles
  • High Resolution
  • Image Processing
  • Image Reconstruction
  • Images
  • Low Resolution
  • Materials
  • Microscopes
  • Microscopy
  • Scanning
  • Silicates

Fields of Study

  • Physics

Readers

  • Computer Vision.
  • Finite Element Method (FEM) for solving Partial Differential Equations (PDEs)
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics