Inverse Problems and Optical Imaging with Nanoscale Resolution
Abstract
The objective of this basic research project is to describe an imaging protocol which will allow optical imaging to resolve nanoscale features (Near Field Tomography), both a the surface and below, of various components. The AF anticipates exploiting ever smaller devices and the manufacturing/inspection of these will benefit from the basic research done here. The PI will continue his seminal research into near field EM. In this not-well understood area the classical rules of thumb regarding wave-length limited resolution do not apply since recourse is now made to the evanescent waves always present in the near field. The PI proposes a mathematical approach involving principles from Inverse Scattering theory requiring the inversion of a suitable Laplace transformation.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 11, 2010
- Accession Number
- ADA565342
Entities
People
- John C. Schotland
Organizations
- University of Pennsylvania