Thin Film PZT Piezo MEMS for Micro-Robotic Angular Rate Sensing and Rotary Actuation

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Document Details

Document Type
Technical Report
Publication Date
Jul 31, 2012
Accession Number
ADA567255

Entities

People

  • Don Devoe
  • Gabriel Smith
  • Jeffrey S. Pulskamp
  • Joe Conroy
  • Luz Sanchez
  • Rob Proie
  • Ron Polcawich
  • Ryan Q. Rudy
  • Sarah S. Bedair
  • Vishnu Ganesan
  • William Nothwang

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Autonomy
  • Biomedical
  • Sensors

DTIC Thesaurus Topics

  • Autonomous Systems
  • Detectors
  • Fabrication
  • Films
  • Frequency
  • Frequency Response
  • Laser Doppler Vibrometers
  • Materials
  • Microelectromechanical Systems
  • Military Research
  • Modal Analysis
  • Robotics
  • Standing Waves
  • Thin Films
  • Traveling Waves
  • Vibrometers
  • Waves

Technology Areas

  • AI & ML
  • AI & ML - Autonomous Systems
  • Autonomy